◆The size of the measurement area can be customized and there are no blind spots.
◆Non-contact non-destructive testing.
◆Supports a variety of electrical property measurements (resistivity, PN judgment, dielectric constant, minority carrier lifetime, mobility, warpage, thickness
◆ Resistivity measurement
◆ PN judgment
◆ Dielectric constant
◆ Migration detection
◆ Warpage detection
◆ Thickness detection
◆ minority carrier lifetime
| THz (Principles of electromagnetic waves) |
Eddy current (Principle of electromagnetic field) |
Four probes (Circuit principle) |
|
|---|---|---|---|
| Detection method | Non-contact non-destructive testing | Non-contact non-destructive testing | Contact destructive testing |
| Detection area size | The size of the measurement area can be customized, with no blind spots | The detection area is large and there is a blind area in the center | The size of the measurement area can be customized, with no blind spots |
| Affected by environment | Measurement accuracy is not affected by ambient light, temperature, and distance | Measurement accuracy is significantly affected by distance | Measurement accuracy is affected by pressure |
| Function | Resistivity, PN judgment, dielectric constant, minority carrier lifetime, mobility, warpage, thickness | Resistivity | Resistivity |
